Proton implanted single mode holey vertical-cavity surface-emitting lasers
This paper presents the design, fabrication, and characterization of wedge-shaped holes in proton-implant VCSELs. CW measurements indicate this holey structure can decrease threshold current, increase maximum single mode output power, and increase the efficiency of the VCSEL. With further refinement of the wedge-shape and implant diameter, to form a more optimum radially graded index profile, greater enhancement of the single mode VCSEL output is expected.
Vertical cavity surface emitting lasers, Protons, Laser modes, Surface emitting lasers, Optical device fabrication, Current measurement, Power measurement, Threshold current, Power generation, Implants
P. O. Leisher, A. J. Danner, J. J. Raftery and K. D. Choquette, "Proton implanted single mode holey vertical-cavity surface-emitting lasers," 2005 IEEE LEOS Annual Meeting Conference Proceedings, Sydney, NSW, Australia, 2005, pp. 463-464, doi: 10.1109/LEOS.2005.1548079.