Focused ion beam post-processing for single mode photonic crystal vertical cavity surface-emitting lasers
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Authors
Danner, Aaron J.
Yokouchi, Noriyuki
Raftery, James J.
Choquette, Kent D.
Issue Date
2003
Type
proceedings-article
Language
Keywords
Crystalline materials , Etching , Ion beams , Laser modes , Lattices , Optical materials , Photonic crystals , Silicon compounds , Surface emitting lasers , Vertical Cavity Surface Emitting Lasers
Alternative Title
Abstract
In this paper, we present the first photonic crystal VCSELs fabricated using FIBE method whereby photonic crystal holes can be etched into prefabricated VCSELs.
Description
Citation
Danner, Aaron J., N. Yokouchi, James J. Raftery and Kent D. Choquette. “Focused ion beam post-processing for single mode photonic crystal vertical cavity surface-emitting lasers.” 61st Device Research Conference. Conference Digest (Cat. No.03TH8663) (2003): 155-156.
Publisher
IEEE