Focused ion beam post-processing for single mode photonic crystal vertical cavity surface-emitting lasers

Danner, A.J.; Yokouchi, N.; Raftery, J.J.; Choquette, Kent D.

Focused ion beam post-processing for single mode photonic crystal vertical cavity surface-emitting lasers

Date

2003

Authors

Publisher

IEEE

Abstract

In this paper, we present the first photonic crystal VCSELs fabricated using FIBE method whereby photonic crystal holes can be etched into prefabricated VCSELs.

Keywords

Crystalline materials, Etching, Ion beams, Laser modes, Lattices, Optical materials, Photonic crystals, Silicon compounds, Surface emitting lasers, Vertical cavity surface emitting lasers

Citation

Danner, Aaron J., N. Yokouchi, James J. Raftery and Kent D. Choquette. “Focused ion beam post-processing for single mode photonic crystal vertical cavity surface-emitting lasers.” 61st Device Research Conference. Conference Digest (Cat. No.03TH8663) (2003): 155-156.