Focused ion beam post-processing for single mode photonic crystal vertical cavity surface-emitting lasers
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proceedings-article
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Abstract
In this paper, we present the first photonic crystal VCSELs fabricated using FIBE method whereby photonic crystal holes can be etched into prefabricated VCSELs.
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Citation
Danner, Aaron J., N. Yokouchi, James J. Raftery and Kent D. Choquette. “Focused ion beam post-processing for single mode photonic crystal vertical cavity surface-emitting lasers.” 61st Device Research Conference. Conference Digest (Cat. No.03TH8663) (2003): 155-156.
Publisher
IEEE